Other.m/c.plant or laboratory eqp.- app.for chem.vapour deposition on lcd substrates.

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Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof Commodity code: 84
- Machinery, plant or laboratory equipment whether or not electrically heated (excl. furnaces, ovens and other equipment of heading 8514), for the treatment of materials by a process involving a change of temperature such as heating, cooking, roasting, Commodity code: 84 19
  - Machinery, plant or laboratory equipment, whether or not electrically heated, for the treatment of materials by a process involving a change of temperature such as heating, cooking, roasting, sterilising, pasteurising, steaming, evaporating, vaporisi Commodity code: 84 19 89
    - Other.m/c.plant or laboratory eqp.- app.for chem.vapour deposition on lcd substrates. Commodity code: 84 19 89 27
    - Cooling towers and similar plant for direct cooling (without a separating wall) by means of recirculated water Commodity code: 84 19 89 10
    - Apparatus for rapid thermal heating of semiconductor wafers Commodity code: 84 19 89 15
    - Apparatus for chemical vapour deposition on semiconductor wafers Commodity code: 84 19 89 20
    - Apparatus for physical vapour deposition by electronic beam or evaporation on semi-conductor wafers Commodity code: 84 19 89 25
    - Vacuum-vapour plant for the deposition of metal Commodity code: 84 19 89 30
    - Machinery, plant or laboratory equipment, whether or not electrically heated, for the treatment of materials by a process involving a change of temperature, n.e.s. Commodity code: 84 19 89 98