Apparatus for chemical vapour deposition on semiconductor wafers

Commodity

Commodity Code

84198920

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Commodity group

• Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof 84
  • Machinery, plant or laboratory equipment whether or not electrically heated (excl. furnaces, ovens and other equipment of heading 8514), for the treatment of materials by a process involving a change of temperature such as heating, cooking, roasting, 8419
    • Machinery, plant or laboratory equipment, whether or not electrically heated, for the treatment of materials by a process involving a change of temperature such as heating, cooking, roasting, sterilising, pasteurising, steaming, evaporating, vaporisi 841989
      • Apparatus for chemical vapour deposition on semiconductor wafers 84198920
      • Cooling towers and similar plant for direct cooling (without a separating wall) by means of recirculated water 84198910
      • Apparatus for rapid thermal heating of semiconductor wafers 84198915
      • Apparatus for physical vapour deposition by electronic beam or evaporation on semi-conductor wafers 84198925
      • Other.m/c.plant or laboratory eqp.- app.for chem.vapour deposition on lcd substrates. 84198927
      • Vacuum-vapour plant for the deposition of metal 84198930
      • Machinery, plant or laboratory equipment, whether or not electrically heated, for the treatment of materials by a process involving a change of temperature, n.e.s. 84198998