Parts and accessories for optical instruments and appliances for inspecting semiconductor wafers or devices or for inspecting photomasks or reticles used in manufacturing semiconductor devices or for measuring surface particulate contamination on semiconductor wafers, n.e.s.

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Optical, photographic, cinematographic, measuring, checking, precision, medical or surgical instruments and apparatus; parts and accessories thereof Commodity code: 90
- Measuring or checking instruments, appliances and machines not elsewhere specified in chapter 90; profile projectors Commodity code: 90 31
  - Parts and accessories for instruments, appliances and machines for measuring and checking, n.e.s. Commodity code: 90 31 90
    - Parts and accessories for optical instruments and appliances for inspecting semiconductor wafers or devices or for inspecting photomasks or reticles used in manufacturing semiconductor devices or for measuring surface particulate contamination on semiconductor wafers, n.e.s. Commodity code: 90 31 90 20