Parts and accessories for machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays, and for machines and apparatus specified in note 9 C to chapter 84, n.e.s. (excl. tool holders, self-opening dieheads, workholders, those of spinners for coating photographic emulsi

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Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof Commodity code: 84
- Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in note 11 C to chapter Commodity code: 84 86
  - Parts and accessories for machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays, and for machines and apparatus Commodity code: 84 86 90
    - Parts and accessories for machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays, and for machines and apparatus specified in note 9 C to chapter 84, n.e.s. (excl. tool holders, self-opening dieheads, workholders, those of spinners for coating photographic emulsi Commodity code: 84 86 90 90
    - Parts and accessories for machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays, and for machines and apparatus specified in note 11 C to chapter 84, n.e.s. Commodity code: 84 86 90 00
    - Tool holders, self-opening dieheads and workholders of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays Commodity code: 84 86 90 10
    - Parts of spinners for coating photographic emulsions on liquid crystal devices "LCD" substrates, n.e.s. Commodity code: 84 86 90 20
    - Parts of deflash machines for cleaning the metal leads of semiconductor packages prior to the electroplating process, n.e.s. Commodity code: 84 86 90 30
    - Parts of apparatus for physical deposition by sputtering on liquid crystal devices "LCD" substrates, n.e.s. Commodity code: 84 86 90 40
    - Parts and accessories for apparatus for dry-etching patterns on liquid crystal devices "LCD" substrates, n.e.s. Commodity code: 84 86 90 50
    - Parts and accessories for apparatus for chemical vapour deposition on liquid crystal devices "LCD" substrates, n.e.s. Commodity code: 84 86 90 60
    - Parts and accessories for machine-tools operated by ultrasonic processes, n.e.s. Commodity code: 84 86 90 70