Apparatus for dry-etching patterns on liquid cristal devices "LCD" substrates, for the manufacture of flat panel displays

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Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof Commodity code: 84
- Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in note 11 C to chapter Commodity code: 84 86
  - Machines and apparatus for the manufacture of flat panel displays Commodity code: 84 86 30
    - Apparatus for dry-etching patterns on liquid cristal devices "LCD" substrates, for the manufacture of flat panel displays Commodity code: 84 86 30 30
    - Machines and apparatus for the manufacture of flat panel displays Commodity code: 84 86 30 00
    - Apparatus for chemical vapour deposition on liquid crystal devices "LCD" substrates, for the manufacture of flat panel displays Commodity code: 84 86 30 10
    - Apparatus for physical deposition by sputtering on liquid cristal devices "LCD" substrates, for the manufacture of flat panel displays Commodity code: 84 86 30 50
    - Machines and apparatus for the manufacture of flat panel displays (excl. apparatus for chemical vapour deposition or for dry-etching patterns on LCD substrates and for physical deposition by sputtering on liquid cristal devices substrates) Commodity code: 84 86 30 90