Machine tools for working any material by removal of material, operated by ultrasonic processes, for the manufacture of semiconductor devices or of electronic integrated circuits

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Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof Commodity code: 84
- Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in note 11 C to chapter Commodity code: 84 86
  - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits Commodity code: 84 86 20
    - Machine tools for working any material by removal of material, operated by ultrasonic processes, for the manufacture of semiconductor devices or of electronic integrated circuits Commodity code: 84 86 20 10