Machine tools for dry-etching patterns on semiconductor mats

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Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof Commodity code: 84
- Machine tools for working any material by removal of material, by laser or other light or photon beam, ultrasonic, electro-discharge, electro-chemical, electron beam, ionic-beam or plasma arc processes; water-jet cutting machines (excl. cleaning appa Commodity code: 84 56
  - Apparatus for dry-etching patterns on semiconductor materials Commodity code: 84 56 91
    - Machine tools for dry-etching patterns on semiconductor mats Commodity code: 84 56 91 00