Centrifuges of a kind used in the manufacture of semicon wafers

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Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof Commodity code: 84
- Centrifuges, incl. centrifugal dryers (excl. those for isotope separation); filtering or purifying machinery and apparatus, for liquids or gases; parts thereof (excl. artificial kidneys) Commodity code: 84 21
  - Centrifuges, incl. centrifugal dryers (excl. isotope separators, cream separators and clothes dryers) Commodity code: 84 21 19
    - Centrifuges of a kind used in the manufacture of semicon wafers Commodity code: 84 21 19 40