Vacuum pumps for use in semiconductor production, of a kind used only secondarily for it

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Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof Commodity code: 84
- Air or vacuum pumps (excl. gas compound elevators and pneumatic elevators and conveyors); air or other gas compressors and fans; ventilating or recycling hoods incorporating a fan, whether or not fitted with filters; gas-tight biological safety cabin Commodity code: 84 14
  - Vacuum pumps Commodity code: 84 14 10
    - Vacuum pumps for use in semiconductor production, of a kind used only secondarily for it Commodity code: 84 14 10 20