Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits (excl. machine tools for working any material by removal of material operated by ultrasonic processes)

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Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof Commodity code: 84
- Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in note 11 C to chapter Commodity code: 84 86
  - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits Commodity code: 84 86 20
    - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits (excl. machine tools for working any material by removal of material operated by ultrasonic processes) Commodity code: 84 86 20 90